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MOTOROLA
SEMICONDUCTOR TECHNICAL DATA
Order this document by MPXC2011DT1/D
High Volume Sensor for Low Pressure Applications
Motorola has developed a low cost, high volume, miniature pressure sensor package which is ideal as a sub-module component or a disposable unit. The unique concept of the Chip Pak allows great flexibility in system design while allowing an economic solution for the designer. This new chip carrier package uses Motorola's unique sensor die with its piezoresistive technology, along with the added feature of on-chip, thin-film temperature compensation and calibration. NOTE: Motorola is also offering the Chip Pak package in application-specific configurations, which will have an "SPX" prefix, followed by a four-digit number, unique to the specific customer. Features: * Low Cost * Integrated Temperature Compensation and Calibration * Ratiometric to Supply Voltage * Polysulfone Case Material (Medical, Class V Approved) * Provided in Easy-to-Use Tape and Reel Application Examples * Respiratory Diagnostics * Air Movement Control * Controllers * Pressure Switching NOTE: The die and wire bonds are exposed on the front side of the Chip Pak (pressure is applied to the backside of the device). Front side die and wire protection must be provided in the customer's housing. Use caution when handling the devices during all processes. Motorola's MPXC2011DT1/MPXC2012DT1 Pressure Sensor has been designed for medical usage by combining the performance of Motorola's shear stress pressure sensor design and the use of biomedically approved materials. Materials with a proven history in medical situations have been chosen to provide a sensor that can be used with confidence in applications, such as invasive blood pressure monitoring. It can be sterilized using ethylene oxide. The portions of the pressure sensor that are required to be biomedically approved are the rigid housing and the gel coating. The rigid housing is molded from a white, medical grade polysulfone that has passed extensive biological testing including: tissue culture test, rabbit implant, hemolysis, intracutaneous test in rabbits, and system toxicity, USP.
MPXC2011DT1 MPXC2012DT1
Motorola Preferred Device
PRESSURE SENSORS 0 to 75 mmHg (0 to 10 kPa)
CHIP PAK PACKAGE
MPXC2011DT1/MPXC2012DT1 CASE 423A
PIN NUMBER
1 2 Gnd S+ 3 4 VS S-
The MPXC2011DT1 contains a silicone dielectric gel which covers the silicon piezoresistive sensing element. The gel is a nontoxic, nonallergenic elastomer system which meets all USP XX Biological Testing Class V requirements. The properties of the gel allow it to transmit pressure uniformly to the diaphragm surface, while isolating the internal electrical connections from the corrosive effects of fluids, such as saline solution. The gel provides electrical isolation sufficient to withstand defibrillation testing, as specified in the proposed Association for the Advancement of Medical Instrumentation (AAMI) Standard for blood pressure transducers. A biomedically approved opaque filler in the gel prevents bright operating room lights from affecting the performance of the sensor. The MPXC2012DT1 is a no-gel option.
Preferred devices are Motorola recommended choices for future use and best overall value.
REV 2
Motorola Sensor Device Data (c) Motorola, Inc. 2002
MPXC2011DT1 MPXC2012DT1 1
MAXIMUM RATINGS(NOTE)
Rating Maximum Pressure (Backside) Storage Temperature Operating Temperature Symbol Pmax Tstg TA Value 75 -25 to +85 +15 to +40 Unit kPa C C
NOTE: Exposure beyond the specified limits may cause permanent damage or degradation to the device.
OPERATING CHARACTERISTICS (VS = 10 Vdc, TA = 25C unless otherwise noted, P1 > P2)
Characteristic Pressure Supply Range(1) Symbol POP VS Io VFSS Voff V/P -- (0 to 10 kPa) (+15C to +40C) Span(5) -- -- TCVFSS TCVoff Zin Zout (10% to 90%) tR -- -- Min 0 -- -- 24 -1.0 -- -1.0 -- -- -1.0 -1.0 1300 1400 -- -- -- Typ -- 3 6.0 25 -- 2.5 -- 0.1 0.1 -- -- -- -- 1.0 20 0.5 Max 10 10 -- 26 1.0 -- 1.0 -- -- 1.0 1.0 2550 3000 -- -- -- Unit kPa Vdc mAdc mV mV mV/kPa %VFSS %VFSS %VFSS %VFSS mV ms ms %VFSS
Voltage(2)
Supply Current Full Scale Offset(4) Sensitivity Linearity(5) Pressure Hysteresis(5) Span(3)
Temperature
Hysteresis(5)
Temperature Effect on Full Scale Temperature Effect on Offset(5) Input Impedance Output Impedance Response Warm-Up Offset Stability(7) Time(6)
NOTES: 1. 1.0 kPa (kiloPascal) equals 0.145 psi. 2. Device is ratiometric within this specified excitation range. Operating the device above the specified excitation range may induce additional error due to device self-heating. 3. Full Scale Span (VFSS) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the minimum rated pressure. 4. Offset (Voff) is defined as the output voltage at the minimum rated pressure. 5. Accuracy (error budget) consists of the following: * Linearity: Output deviation from a straight line relationship with pressure, using end point method, over the specified pressure range. * Temperature Hysteresis: Output deviation at any temperature within the operating temperature range, after the temperature is cycled to and from the minimum or maximum operating temperature points, with zero differential pressure applied. * Pressure Hysteresis: Output deviation at any pressure within the specified range, when this pressure is cycled to and from the minimum or maximum rated pressure, at 25C. * TcSpan: Output deviation at full rated pressure over the temperature range of 0 to 85C, relative to 25C. * TcOffset: Output deviation with minimum rated pressure applied, over the temperature range of 0 to 85C, relative to 25C. 6. Response Time is defined as the time for the incremental change in the output to go from 10% to 90% of its final value when subjected to a specified step change in pressure. 7. Offset stability is the product's output deviation when subjected to 1000 hours of Pulsed Pressure, Temperature Cycling with Bias Test.
MPXC2011DT1 MPXC2012DT1 2
Motorola Sensor Device Data
ORDERING INFORMATION The MPXC2011DT1/MPXC2012DT1 silicon pressure sensors are available in tape and reel.
Device Type/Order No. Case No. 423A 423A Device Description Chip Pak, 1/3 Gel Chip Pak, No Gel Tape Width 24 mm Marking Date Code, Lot ID Date Code, Lot ID Quantity 1000 pc/reel
MPXC2011DT1 MPXC2012DT1
Packaging Information Tape and Reel
Reel Size 330 mm
PACKAGE DIMENSIONS
A M C L N
F B
1
23
4
V K DETAIL A
D1 G H FRONT VIEW E
-T- J
END VIEW AC F AA AB
NOTES: 8. DIMENSIONING AND TOLERANCING PER ANSI Y14.5M, 1982. 9. CONTROLLING DIMENSION: INCH. INCHES MIN MAX 0.240 0.260 0.350 0.370 0.140 0.150 0.012 0.020 0.014 0.022 0.088 0.102 0.123 0.128 0.045 0.055 0.037 0.047 0.007 0.011 0.120 0.140 0.095 0.105 0.165 0.175 0.223 0.239 0.105 0.115 0.095 0.107 0.015 0.035 0.120 0.175 0.100 0.115 MILLIMETERS MIN MAX 6.10 6.60 8.89 9.40 3.56 3.81 0.30 0.51 0.36 0.56 2.24 2.59 3.12 3.25 1.14 1.40 0.94 1.19 0.18 0.28 3.05 3.56 2.41 2.67 4.19 4.45 5.66 6.07 2.67 2.92 2.41 2.72 0.38 0.89 3.05 4.45 2.54 2.92
AD D2 DETAIL A BACK VIEW
DIM A B C D1 D2 E F G H J K L M N V AA AB AC AD
CASE 423A-03 ISSUE C
Motorola Sensor Device Data
MPXC2011DT1 MPXC2012DT1 3
Motorola reserves the right to make changes without further notice to any products herein. Motorola makes no warranty, representation or guarantee regarding the suitability of its products for any particular purpose, nor does Motorola assume any liability arising out of the application or use of any product or circuit, and specifically disclaims any and all liability, including without limitation consequential or incidental damages. "Typical" parameters can and do vary in different applications and actual performance may vary over time. All operating parameters, including "Typicals" must be validated for each customer application by customer's technical experts. Motorola does not convey any license under its patent rights nor the rights of others. Motorola products are not designed, intended, or authorized for use as components in systems intended for surgical implant into the body, or other applications intended to support or sustain life, or for any other application in which the failure of the Motorola product could create a situation where personal injury or death may occur. Should Buyer purchase or use Motorola products for any such unintended or unauthorized application, Buyer shall indemnify and hold Motorola and its officers, employees, subsidiaries, affiliates, and distributors harmless against all claims, costs, damages, and expenses, and reasonable attorney fees arising out of, directly or indirectly, any claim of personal injury or death associated with such unintended or unauthorized use, even if such claim alleges that Motorola was negligent regarding the design or manufacture of the part. Motorola and the Stylized M Logo are registered trademarks of Motorola, Inc. Motorola, Inc. is an Equal Opportunity/Affirmative Action Employer. MOTOROLA and the Stylized M Logo are registered in the US Patent & Trademark Office. All other product or service names are the property of their respective owners. E Motorola, Inc. 2002. How to reach us: USA/EUROPE/Locations Not Listed: Motorola Literature Distribution; P.O. Box 5405, Denver, Colorado 80217. 1-303-675-2140 or 1-800-441-2447 JAPAN: Motorola Japan Ltd.; SPS, Technical Information Center, 3-20-1, Minami-Azabu. Minato-ku, Tokyo 106-8573 Japan. 81-3-3440-3569 ASIA/PACIFIC: Motorola Semiconductors H.K. Ltd.; Silicon Harbour Centre, 2 Dai King Street, Tai Po Industrial Estate, Tai Po, N.T., Hong Kong. 852-26668334 Technical Information Center: 1-800-521-6274 HOME PAGE: http://www.motorola.com/semiconductors/
MPXC2011DT1 MPXC2012DT1 4
Motorola Sensor Device Data
MPXC2011DT1/D

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